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Issues associated with cleaning of nanosize particles

dc.contributor.authorFyen, Wim
dc.contributor.authorVereecke, Guy
dc.contributor.authorXu, Kaidong
dc.contributor.authorLauerhaas, J.
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T04:44:39Z
dc.date.available2021-10-15T04:44:39Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7594
dc.sourceIIOimport
dc.titleIssues associated with cleaning of nanosize particles
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage334
dc.source.endpage343
dc.source.conferenceCMP-MIC 8th Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference
dc.source.conferencedate19/02/2003
dc.source.conferencelocationMarina del Rey USA
imec.availabilityPublished - imec


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