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Micromachined infrared pneumatic detector for gas sensor

dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorSlater, Tim
dc.contributor.authorVerbist, Agnes
dc.date.accessioned2021-09-29T12:40:07Z
dc.date.available2021-09-29T12:40:07Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/75
dc.sourceIIOimport
dc.titleMicromachined infrared pneumatic detector for gas sensor
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage445
dc.source.endpage453
dc.source.conferenceMicro System Technologies '94. 4th International Conference on Micro, Electro, Opto, Mechanical Systems and Components
dc.source.conferencedate19/10/1994
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - open access


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