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Evaluation of different chlorine sources for gate oxidation
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Authors
Mertens, Paul
;
Vermeire, Bert
;
Depas, Michel
;
Schaekers, Marc
;
Heyns, Marc
Conference
7th Annual Dielectrics and CVD Metallization Symposium
Title
Evaluation of different chlorine sources for gate oxidation
Publication type
Proceedings paper
Embargo date
9999-12-31
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