Skip to content
Maintenance work will take place today between 6:00-6:30 PM. The service may be unavailable during this time. We apologize for any inconvenience.
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Evaluation of different chlorine sources for gate oxidation
Publication:
Evaluation of different chlorine sources for gate oxidation
Copy permalink
Date
1995
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
734.pdf
1.12 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Mertens, Paul
;
Vermeire, Bert
;
Depas, Michel
;
Schaekers, Marc
;
Heyns, Marc
Journal
Abstract
Description
Statistics
Views
1939
since deposited on 2021-09-29
1
last month
Acq. date: 2026-07-27
Citations
Statistics
Views
1939
since deposited on 2021-09-29
1
last month
Acq. date: 2026-07-27
Citations