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A traceable method for the arc-free characterization and modeling of CDM testers and pulse metrology chains

dc.contributor.authorGieser, Horst A.
dc.contributor.authorWolf, Heinrich
dc.contributor.authorSoldner, Wolfgang
dc.contributor.authorReichl, Herbert
dc.contributor.authorAndreini, Antonio
dc.contributor.authorMahadeva Iyer, Natarajan
dc.contributor.authorStadler, Wolfgang
dc.date.accessioned2021-10-15T04:47:17Z
dc.date.available2021-10-15T04:47:17Z
dc.date.issued2003-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7610
dc.sourceIIOimport
dc.titleA traceable method for the arc-free characterization and modeling of CDM testers and pulse metrology chains
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.beginpage328
dc.source.endpage337
dc.source.conferenceEOS/ESD Symposium
dc.source.conferencedate21/09/2003
dc.source.conferencelocationLas Vegas USA
imec.availabilityPublished - imec


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