dc.contributor.author | Groeseneken, Guido | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Degraeve, Robin | |
dc.date.accessioned | 2021-10-15T04:51:31Z | |
dc.date.available | 2021-10-15T04:51:31Z | |
dc.date.issued | 2003-04 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7634 | |
dc.source | IIOimport | |
dc.title | Analysis of short channel MOSFET behavior after gate oxide breakdown and its impact on digital circuit reliability | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.source.peerreview | no | |
dc.source.beginpage | 173 | |
dc.source.endpage | 198 | |
dc.source.conference | Silicon Nitride and Silicon Dioxide Thin Insulating Films VII | |
dc.source.conferencedate | 28/04/2003 | |
dc.source.conferencelocation | Paris France | |
imec.availability | Published - imec | |
imec.internalnotes | Electrochemical Society Proceedings; Vol. 2003-02 | |