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Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch- total reflection X-ray fluorescence spectrometry
Publication:
Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch- total reflection X-ray fluorescence spectrometry
Date
2003-12
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hellin, David
;
Bearda, Twan
;
Zhao, Chao
;
Raskin, G.
;
Mertens, Paul
;
De Gendt, Stefan
;
Heyns, Marc
;
Vinckier, Chris
Journal
Spectrochim. Acta B
Abstract
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1927
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1927
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations