Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch- total reflection X-ray fluorescence spectrometry
View/
open
7570.pdf (894.9Kb)
Metadata
Show full item record
Authors
Hellin, David
;
Bearda, Twan
;
Zhao, Chao
;
Raskin, G.
;
Mertens, Paul
;
De Gendt, Stefan
;
Heyns, Marc
;
Vinckier, Chris
Issue
12
Journal
Spectrochim. Acta B
Volume
58
Title
Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch- total reflection X-ray fluorescence spectrometry
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login