dc.contributor.author | Hellin, David | |
dc.contributor.author | Bearda, Twan | |
dc.contributor.author | Zhao, Chao | |
dc.contributor.author | Raskin, G. | |
dc.contributor.author | Mertens, Paul | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Vinckier, Chris | |
dc.date.accessioned | 2021-10-15T04:53:12Z | |
dc.date.available | 2021-10-15T04:53:12Z | |
dc.date.issued | 2003-12 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7644 | |
dc.source | IIOimport | |
dc.title | Determination of metallic contaminants on Ge wafers using direct- and droplet sandwich etch- total reflection X-ray fluorescence spectrometry | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hellin, David | |
dc.contributor.imecauthor | Mertens, Paul | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 2093 | |
dc.source.endpage | 2104 | |
dc.source.journal | Spectrochim. Acta B | |
dc.source.issue | 12 | |
dc.source.volume | 58 | |
imec.availability | Published - open access | |
imec.internalnotes | 9th Symp. Total Reflection X-Ray Analysis and Related Methods; Madeira, Portugal; Sept. 2002 | |