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Evaluation of megasonic cleaning processes

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorRiskin, Alexander
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T04:55:42Z
dc.date.available2021-10-15T04:55:42Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7657
dc.sourceIIOimport
dc.titleEvaluation of megasonic cleaning processes
dc.typeMeeting abstract
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewno
dc.source.conference204th Meeting of the Electrochemical Society: 8th Int. Symp. on Cleaning Technology in Semiconductor Device Manufacturing
dc.source.conferencedate13/10/2003
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - imec
imec.internalnotesAbstract 780


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