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Surfactants in megasonic cleaning processes

dc.contributor.authorHolsteyns, Frank
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-15T04:56:02Z
dc.date.available2021-10-15T04:56:02Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7659
dc.sourceIIOimport
dc.titleSurfactants in megasonic cleaning processes
dc.typeMeeting abstract
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.source.peerreviewno
dc.source.beginpage345
dc.source.conferenceAbstracts of Papers of the American Chemical Society
dc.source.conferencelocation
imec.availabilityPublished - imec


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