Show simple item record

The IMEC clean : A new concept for particle and metal removal on Si surfaces

dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorOpdebeeck, Ann
dc.contributor.authorSchmidt, Harald
dc.contributor.authorDepas, Michel
dc.contributor.authorVereecke, Guy
dc.contributor.authorHeyns, Marc
dc.contributor.authorPhilipossian, A.
dc.date.accessioned2021-09-29T13:11:20Z
dc.date.available2021-09-29T13:11:20Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/766
dc.sourceIIOimport
dc.titleThe IMEC clean : A new concept for particle and metal removal on Si surfaces
dc.typeJournal article
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorOpdebeeck, Ann
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpage109
dc.source.endpage14
dc.source.journalSolid State Technology
dc.source.issue7
dc.source.volume38
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record