The IMEC clean : A new concept for particle and metal removal on Si surfaces

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Authors

Meuris, Marc; Mertens, Paul; Opdebeeck, Ann; Schmidt, Harald; Depas, Michel; Vereecke, Guy; Heyns, Marc; Philipossian, A.

Issue

7

Journal

Solid State Technology

Volume

38

Title

The IMEC clean : A new concept for particle and metal removal on Si surfaces

Publication type

Journal article

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