Publication:
The IMEC clean : A new concept for particle and metal removal on Si surfaces
Date
| dc.contributor.author | Meuris, Marc | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Opdebeeck, Ann | |
| dc.contributor.author | Schmidt, Harald | |
| dc.contributor.author | Depas, Michel | |
| dc.contributor.author | Vereecke, Guy | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.author | Philipossian, A. | |
| dc.contributor.imecauthor | Meuris, Marc | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Opdebeeck, Ann | |
| dc.contributor.imecauthor | Vereecke, Guy | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
| dc.date.accessioned | 2021-09-29T13:11:20Z | |
| dc.date.available | 2021-09-29T13:11:20Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/766 | |
| dc.source.beginpage | 109 | |
| dc.source.endpage | 14 | |
| dc.source.issue | 7 | |
| dc.source.journal | Solid State Technology | |
| dc.source.volume | 38 | |
| dc.title | The IMEC clean : A new concept for particle and metal removal on Si surfaces | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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