Authors

Meuris, Marc; Opdebeeck, Ann; Cornelissen, Ingrid; Rotondaro, Antonio; Mertens, Paul; Heyns, Marc

Conference

Electrochemical Society Fall Meeting: 4th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

Important parameters influencing the rince efficiency of silicon wafers

Publication type

Meeting abstract

Embargo date

9999-12-31