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Buckling instabilities of thin cap layers deposited onto low-k dielectric films

dc.contributor.authorIacopi, Francesca
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorAbell, Thomas
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:58:36Z
dc.date.available2021-10-15T04:58:36Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7674
dc.sourceIIOimport
dc.titleBuckling instabilities of thin cap layers deposited onto low-k dielectric films
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.beginpage383
dc.source.endpage388
dc.source.conferencePolymer/Metal Interfaces and Defect Mediated Phenomena in Ordered Polymers
dc.source.conferencedate2/12/2002
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol.734


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