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Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system

dc.contributor.authorIacopi, Francesca
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:58:46Z
dc.date.available2021-10-15T04:58:46Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7675
dc.sourceIIOimport
dc.titleCompressive stress relaxation through buckling on a low-k polymer-thin cap layer system
dc.typeJournal article
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1380
dc.source.endpage1382
dc.source.journalApplied Physics Letters
dc.source.issue9
dc.source.volume82
imec.availabilityPublished - open access


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