Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system

View/open

7182.pdf (423.0Kb)

Metadata

Show full item record

Authors

Iacopi, Francesca; Brongersma, Sywert; Maex, Karen

Issue

9

Journal

Applied Physics Letters

Volume

82

Title

Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles