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Articles
Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system
Publication:
Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Iacopi, Francesca
;
Brongersma, Sywert
;
Maex, Karen
Journal
Applied Physics Letters
Abstract
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1819
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1819
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations