Publication:
Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system
Date
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Brongersma, Sywert | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Brongersma, Sywert | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Brongersma, Sywert::0000-0002-1755-3897 | |
| dc.date.accessioned | 2021-10-15T04:58:46Z | |
| dc.date.available | 2021-10-15T04:58:46Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7675 | |
| dc.source.beginpage | 1380 | |
| dc.source.endpage | 1382 | |
| dc.source.issue | 9 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 82 | |
| dc.title | Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |