Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance

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Authors

Iacopi, Francesca; Patz, Michael; Vos, Ingrid; Tokei, Zsolt; Sijmus, Bram; Le, Quoc Toan; Sleeckx, Erik; Eyckens, Brenda; Struyf, Herbert; Das, Arabinda; Maex, Karen

Issue

2_4

Journal

Microelectronic Engineering

Volume

70

Title

Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance

Publication type

Journal article

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