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Impact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance

dc.contributor.authorIacopi, Francesca
dc.contributor.authorPatz, Michael
dc.contributor.authorVos, Ingrid
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSijmus, Bram
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorSleeckx, Erik
dc.contributor.authorEyckens, Brenda
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDas, Arabinda
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T04:58:59Z
dc.date.available2021-10-15T04:58:59Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7676
dc.sourceIIOimport
dc.titleImpact of LKD5109 low-k to cap/liner interfaces in single damascene process and performance
dc.typeJournal article
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.source.peerreviewno
dc.source.beginpage293
dc.source.endpage301
dc.source.journalMicroelectronic Engineering
dc.source.issue2_4
dc.source.volume70
imec.availabilityPublished - imec
imec.internalnotesMaterials for Advanced Metallization 2003


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