An analytic Volterra-series-based model for a MEMS variable capacitor

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Authors

Innocent, Manuel; Wambacq, Piet; Donnay, Stephane; Tilmans, Harrie; Sansen, Willy; De Man, Hugo

Issue

2

Journal

IEEE Trans. Computer-aided design of integrated circuits and systems

Volume

22

Title

An analytic Volterra-series-based model for a MEMS variable capacitor

Publication type

Journal article

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