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An analytic Volterra-series-based model for a MEMS variable capacitor
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Authors
Innocent, Manuel
;
Wambacq, Piet
;
Donnay, Stephane
;
Tilmans, Harrie
;
Sansen, Willy
;
De Man, Hugo
Issue
2
Journal
IEEE Trans. Computer-aided design of integrated circuits and systems
Volume
22
Title
An analytic Volterra-series-based model for a MEMS variable capacitor
Publication type
Journal article
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