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An analytic Volterra-series-based model for a MEMS variable capacitor

dc.contributor.authorInnocent, Manuel
dc.contributor.authorWambacq, Piet
dc.contributor.authorDonnay, Stephane
dc.contributor.authorTilmans, Harrie
dc.contributor.authorSansen, Willy
dc.contributor.authorDe Man, Hugo
dc.date.accessioned2021-10-15T05:00:07Z
dc.date.available2021-10-15T05:00:07Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7682
dc.sourceIIOimport
dc.titleAn analytic Volterra-series-based model for a MEMS variable capacitor
dc.typeJournal article
dc.contributor.imecauthorWambacq, Piet
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Man, Hugo
dc.contributor.orcidimecWambacq, Piet::0000-0003-4388-7257
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage124
dc.source.endpage131
dc.source.journalIEEE Trans. Computer-aided design of integrated circuits and systems
dc.source.issue2
dc.source.volume22
imec.availabilityPublished - imec


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