Optimization of 0-level packaging for RF-MEMS devices

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Authors
Jourdain, Anne; Rottenberg, Xavier; Carchon, Geert; Tilmans, Harrie
Conference
Transducers 2003, 12th Int. conf. on Solid-State Sensors, Actuators and Transducers
Title
Optimization of 0-level packaging for RF-MEMS devices
Publication type
Proceedings paper
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