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Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration

dc.contributor.authorKerber, Andreas
dc.contributor.authorCartier, Eduard
dc.contributor.authorDegraeve, Robin
dc.contributor.authorRoussel, Philippe
dc.contributor.authorPantisano, Luigi
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-15T05:08:22Z
dc.date.available2021-10-15T05:08:22Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7726
dc.sourceIIOimport
dc.titleCharge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage45
dc.source.endpage52
dc.source.conferenceProceedings of the 12th Workshop on Dielectrics in Microelectronics
dc.source.conferencedate18/11/2002
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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