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Thin film technology based micro-Fourier spectrometer

dc.contributor.authorKnipp, Dietmar
dc.contributor.authorStiebig, H.
dc.contributor.authorBhalotra, S.
dc.contributor.authorKung, H.
dc.contributor.authorMiller, D.A.B.
dc.date.accessioned2021-10-15T05:11:56Z
dc.date.available2021-10-15T05:11:56Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7744
dc.sourceIIOimport
dc.titleThin film technology based micro-Fourier spectrometer
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage127
dc.source.endpage138
dc.source.conferenceMOEMS and Miniaturized Systems III
dc.source.conferencedate25/01/2003
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; 4983


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