Authors

Kraus, Harald; Snow, Jim; Van Doorne, Patrick; Mertens, Paul; Kovacs, Frederic

Conference

204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials

Title

Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2

Publication type

Meeting abstract

Embargo date

9999-12-31