dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Iacopi, Francesca | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-10-15T05:20:16Z | |
dc.date.available | 2021-10-15T05:20:16Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7787 | |
dc.source | IIOimport | |
dc.title | Wafer level detection of sealing defects | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.imecauthor | Maex, Karen | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.source.peerreview | no | |
dc.source.conference | MRS Spring Meeting Symposium E: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics | |
dc.source.conferencedate | 21/04/2003 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |