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Polycrystalline SiGe technology for uncooled microbolometer arrays

dc.contributor.authorLeonov, Vladimir
dc.contributor.authorGoessens, Claus
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorGrietens, Bob
dc.contributor.authorPerova, Natalia A.
dc.contributor.authorMalyutenko, Volodymyr
dc.date.accessioned2021-10-15T05:21:58Z
dc.date.available2021-10-15T05:21:58Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7795
dc.sourceIIOimport
dc.titlePolycrystalline SiGe technology for uncooled microbolometer arrays
dc.typeOral presentation
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.conferenceProceedings of SPIE Symposium Materials for Infrared Detectors III
dc.source.conferencedate7/08/2003
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - imec


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