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Line edge roughness: experimental results related to a two-parameter model

dc.contributor.authorLeunissen, Peter
dc.contributor.authorLawrence, W.G.
dc.contributor.authorErcken, Monique
dc.date.accessioned2021-10-15T05:23:07Z
dc.date.available2021-10-15T05:23:07Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7801
dc.sourceIIOimport
dc.titleLine edge roughness: experimental results related to a two-parameter model
dc.typeOral presentation
dc.contributor.imecauthorErcken, Monique
dc.source.peerreviewno
dc.source.conferenceMicro and Nano Engineering 2003
dc.source.conferencedate22/09/2003
dc.source.conferencelocationCambridge U.K.
imec.availabilityPublished - imec


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