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Interfacial properties of ZrO2 on silicon

dc.contributor.authorLin, Y.S.
dc.contributor.authorPuthenkovilakam, R.
dc.contributor.authorChang, J.P.
dc.contributor.authorBouldin, C.
dc.contributor.authorLevin, I.
dc.contributor.authorNguyen, N.V.
dc.contributor.authorEhrstein, J.
dc.contributor.authorSun, Y.
dc.contributor.authorPianetta, P.
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVenturo, V.
dc.contributor.authorSelbrede, S.
dc.date.accessioned2021-10-15T05:23:56Z
dc.date.available2021-10-15T05:23:56Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7805
dc.sourceIIOimport
dc.titleInterfacial properties of ZrO2 on silicon
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage5945
dc.source.endpage2952
dc.source.journalJournal of Applied Physics
dc.source.issue10
dc.source.volume93
imec.availabilityPublished - imec
imec.internalnotes


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