dc.contributor.author | Lisoni, Judit | |
dc.contributor.author | Johnson, J. | |
dc.contributor.author | Everaert, Jean-Luc | |
dc.contributor.author | Paraschiv, Vasile | |
dc.contributor.author | Boullart, Werner | |
dc.contributor.author | Maes, David | |
dc.contributor.author | Haspeslagh, Luc | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Caputa, Concetta | |
dc.contributor.author | Casella, P. | |
dc.contributor.author | Zambrano, R. | |
dc.contributor.author | Vecchio, Emma | |
dc.contributor.author | Monchoix, Hervé | |
dc.contributor.author | Van Autryve, Luc | |
dc.date.accessioned | 2021-10-15T05:25:35Z | |
dc.date.available | 2021-10-15T05:25:35Z | |
dc.date.issued | 2003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7812 | |
dc.source | IIOimport | |
dc.title | Spacers alternatives for integration of 3D stacked SBT FeCAPs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Everaert, Jean-Luc | |
dc.contributor.imecauthor | Paraschiv, Vasile | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.imecauthor | Haspeslagh, Luc | |
dc.contributor.imecauthor | Vecchio, Emma | |
dc.contributor.imecauthor | Van Autryve, Luc | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 257 | |
dc.source.endpage | 267 | |
dc.source.journal | Integrated Ferroelectrics | |
dc.source.volume | 53 | |
imec.availability | Published - open access | |
imec.internalnotes | ISIF - 15th Symposium on Integrated Ferroelectrics; 7-15 March 2003; Colorado Springs, CO, USA | |