Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Spacers alternatives for integration of 3D stacked SBT FeCAPs
View/
open
7711.pdf (337.9Kb)
Metadata
Show full item record
Authors
Lisoni, Judit
;
Johnson, J.
;
Everaert, Jean-Luc
;
Paraschiv, Vasile
;
Boullart, Werner
;
Maes, David
;
Haspeslagh, Luc
;
Wouters, Dirk
;
Caputa, Concetta
;
Casella, P.
;
Zambrano, R.
;
Vecchio, Emma
;
Monchoix, Hervé
;
Van Autryve, Luc
Journal
Integrated Ferroelectrics
Volume
53
Title
Spacers alternatives for integration of 3D stacked SBT FeCAPs
Publication type
Journal article
Embargo date
9999-12-31
Collections
Articles
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login