Publication:

Spacers alternatives for integration of 3D stacked SBT FeCAPs

Date

2003
Journal article
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dc.contributor.authorLisoni, Judit
dc.contributor.authorJohnson, J.
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorBoullart, Werner
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, Concetta
dc.contributor.authorCasella, P.
dc.contributor.authorZambrano, R.
dc.contributor.authorVecchio, Emma
dc.contributor.authorMonchoix, Hervé
dc.contributor.authorVan Autryve, Luc
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-15T05:25:35Z
dc.date.available2021-10-15T05:25:35Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7812
dc.source.beginpage257
dc.source.endpage267
dc.source.journalIntegrated Ferroelectrics
dc.source.volume53
dc.title

Spacers alternatives for integration of 3D stacked SBT FeCAPs

dc.typeJournal article
dspace.entity.typePublication
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