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Stress evolution in integrated SrBiTa2O9 ferroelectric layers

dc.contributor.authorLisoni, Judit
dc.contributor.authorJohnson, J.A.
dc.contributor.authorGoux, Ludovic
dc.contributor.authorWouters, Dirk
dc.date.accessioned2021-10-15T05:25:46Z
dc.date.available2021-10-15T05:25:46Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7813
dc.sourceIIOimport
dc.titleStress evolution in integrated SrBiTa2O9 ferroelectric layers
dc.typeOral presentation
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.conferenceMRS Fall Meeting Symposium C: Ferroelectric Thin Films XII
dc.source.conferencedate30/11/2003
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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