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Mobility degradation in high-k transistors: the role of the charge scattering

dc.contributor.authorLujan, Guilherme
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorMagnus, Wim
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-15T05:29:56Z
dc.date.available2021-10-15T05:29:56Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7833
dc.sourceIIOimport
dc.titleMobility degradation in high-k transistors: the role of the charge scattering
dc.typeProceedings paper
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMagnus, Wim
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference33rd European Solid-State Devices Research Conference - ESSDERC
dc.source.conferencedate16/09/2003
dc.source.conferencelocationEstoril Portugal
imec.availabilityPublished - imec


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