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Optimization of microvia-technology using an excimer laser for application in microelectronics

dc.contributor.authorManirambona, Boniface
dc.contributor.authorDe Baets, Johan
dc.contributor.authorVervaet, Alfons
dc.date.accessioned2021-10-15T05:35:00Z
dc.date.available2021-10-15T05:35:00Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7857
dc.sourceIIOimport
dc.titleOptimization of microvia-technology using an excimer laser for application in microelectronics
dc.typeOral presentation
dc.contributor.imecauthorDe Baets, Johan
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium H: Photonic Processing of Surfaces, Thin Films and Devices
dc.source.conferencedate10/06/2003
dc.source.conferencelocationStrasbourg France
imec.availabilityPublished - imec


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