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Plasma treatments of a low-k dielectric polymer surface

dc.contributor.authorMartin Hoyas, Ana
dc.contributor.authorSchuhmacher, Jörg
dc.contributor.authorWhelan, Caroline
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-15T05:39:15Z
dc.date.available2021-10-15T05:39:15Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7877
dc.sourceIIOimport
dc.titlePlasma treatments of a low-k dielectric polymer surface
dc.typeMeeting abstract
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageSS2
dc.source.conferenceInternational Scientific Meeting Belgian Physical Society
dc.source.conferencedate27/05/2003
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - open access


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