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Characterization of electroplated copper films with laser-generated surface acoustic waves

dc.contributor.authorMaznev, A.A.
dc.contributor.authorGostein, M.
dc.contributor.authorBrongersma, Sywert
dc.date.accessioned2021-10-15T05:40:31Z
dc.date.available2021-10-15T05:40:31Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7883
dc.sourceIIOimport
dc.titleCharacterization of electroplated copper films with laser-generated surface acoustic waves
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.beginpageE3.21
dc.source.conferenceMaterials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
dc.source.conferencedate21/04/2003
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 766


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