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The dilute HCl integrated pre-gate clean

dc.contributor.authorO'Brien, S. C.
dc.contributor.authorHurd, Trace
dc.contributor.authorTipton, C.
dc.date.accessioned2021-09-29T13:12:45Z
dc.date.available2021-09-29T13:12:45Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/791
dc.sourceIIOimport
dc.titleThe dilute HCl integrated pre-gate clean
dc.typeProceedings paper
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage435
dc.source.endpage439
dc.source.conferenceProceedings IES 41st Annual Technical Meeting
dc.source.conferencedate30/04/1995
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - open access


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