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Excimer laser ablation based microlens fabrication for optical fiber coupling purposes

dc.contributor.authorNaessens, Kris
dc.contributor.authorVan Daele, Peter
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-15T05:49:13Z
dc.date.available2021-10-15T05:49:13Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7923
dc.sourceIIOimport
dc.titleExcimer laser ablation based microlens fabrication for optical fiber coupling purposes
dc.typeProceedings paper
dc.contributor.imecauthorVan Daele, Peter
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecVan Daele, Peter::0000-0003-0557-7741
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage133
dc.source.endpage139
dc.source.conferenceLaser Micromachining for Optoelectronic Device Fabrication
dc.source.conferencedate28/10/2002
dc.source.conferencelocationBrugge Belgium
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 4941


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