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Novel RIE-process for high quality InP-based waveguide structures

dc.contributor.authorOei, Y. S.
dc.contributor.authorSpiekman, L. H.
dc.contributor.authorGroen, F. H.
dc.contributor.authorMoerman, Ingrid
dc.contributor.authorMetaal, E. G.
dc.contributor.authorPedersen, J. W.
dc.date.accessioned2021-09-29T13:12:48Z
dc.date.available2021-09-29T13:12:48Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/792
dc.sourceIIOimport
dc.titleNovel RIE-process for high quality InP-based waveguide structures
dc.typeProceedings paper
dc.contributor.imecauthorMoerman, Ingrid
dc.source.peerreviewno
dc.source.beginpage205
dc.source.endpage208
dc.source.conferenceECIO `95 Proceedings.7th European Conference on Integrated Optics with Technical Exhibition. Regular and Invited Papers; April 3
dc.source.conferencelocation
imec.availabilityPublished - imec


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