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Advanced surface preparation leading into the nano-era

dc.contributor.authorOnsia, Bart
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorHeyns, Marc
dc.contributor.authorLin, S.
dc.contributor.authorGreen, Martin
dc.contributor.authorTsai, Wilman
dc.date.accessioned2021-10-15T05:56:24Z
dc.date.available2021-10-15T05:56:24Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7956
dc.sourceIIOimport
dc.titleAdvanced surface preparation leading into the nano-era
dc.typeOral presentation
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.source.peerreviewno
dc.source.conferenceSemicon Europe 2003
dc.source.conferencedate31/03/2003
dc.source.conferencelocationMünchen Duitsland
imec.availabilityPublished - imec


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