Authors

Pamidighantam, Sayanu; Laureyn, Wim; Rusu, Cristina; Baert, Kris; Puers, Bob; Tilmans, Harrie

Issue

1_2

Journal

Sensors and Actuators A: Physical

Volume

103

Title

A wet release process for fabricating slender and compliant suspended micro-mechanical structures

Publication type

Journal article