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A wet release process for fabricating slender and compliant suspended micro-mechanical structures

dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorLaureyn, Wim
dc.contributor.authorRusu, Cristina
dc.contributor.authorBaert, Kris
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-15T05:59:23Z
dc.date.available2021-10-15T05:59:23Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7969
dc.sourceIIOimport
dc.titleA wet release process for fabricating slender and compliant suspended micro-mechanical structures
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage202
dc.source.endpage212
dc.source.journalSensors and Actuators A: Physical
dc.source.issue1_2
dc.source.volume103
imec.availabilityPublished - imec


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