Show simple item record

SrBi2Ta2O2 Patterning for feram applications: a dry -wet approach

dc.contributor.authorParaschiv, Vasile
dc.contributor.authorBoullart, Werner
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorWouters, Dirk
dc.contributor.authorVecchio, Emma
dc.contributor.authorFragala, Maria-Elena
dc.contributor.authorVan Autryve, Luc
dc.contributor.authorMonchoix, Hervé
dc.contributor.authorCasella, Patrizia
dc.contributor.authorZambrano, Raffaele
dc.date.accessioned2021-10-15T06:00:41Z
dc.date.available2021-10-15T06:00:41Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7974
dc.sourceIIOimport
dc.titleSrBi2Ta2O2 Patterning for feram applications: a dry -wet approach
dc.typeOral presentation
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorVan Autryve, Luc
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.conferenceEuropean Congress on Advanced Materials and Processes - Euromat
dc.source.conferencedate1/09/2003
dc.source.conferencelocationLausanne Switserland
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record