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Analysis of halo implant influence on the self-heating and self-heating enhanced impact ionization on 0.13μm floating-body partially-depleted SOI MOSFET at low temperature

dc.contributor.authorPavanello, M.A.
dc.contributor.authorMartino, J.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorClaeys, Cor
dc.contributor.authorvan Meer, Hans
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-15T06:03:16Z
dc.date.available2021-10-15T06:03:16Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7986
dc.sourceIIOimport
dc.titleAnalysis of halo implant influence on the self-heating and self-heating enhanced impact ionization on 0.13μm floating-body partially-depleted SOI MOSFET at low temperature
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage389
dc.source.endpage394
dc.source.conferenceSilicon-on-Insulator Technology and Devices XI
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
imec.availabilityPublished - imec
imec.internalnotesElectrochemical Society Proceedings; Vol. 2003-03


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