Band gap of ALCVD mixed oxide AlZrO and HfAlO measured by XPS

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Authors
Petry, Jasmine; Vandervorst, Wilfried; Conard, Thierry
Conference
E-MRS Spring Meeting Symposium I: Functional Metal Oxides - Semiconductor Structures
Title
Band gap of ALCVD mixed oxide AlZrO and HfAlO measured by XPS
Publication type
Oral presentation
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