A practical baseline process for advanced CMOS devices research

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Authors
Ponomarev, Youri; Loo, Josine; Rittersma, Chris; Lander, Rob; Hooker, Jacob; Doornbos, Gerben; Surdeanu, Radu; Cubaynes, Florence; Dachs, Charles; Kubicek, Stefan; Henson, Kirklen; Lindsay, Richard
Conference
Proceedings 33rd European Solid-State Device Research Conference - ESSDERC
Title
A practical baseline process for advanced CMOS devices research
Publication type
Proceedings paper
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