Impact of shallow trench isolation depth on leakage current of shallow p-n junctions

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Authors
Poyai, Amporn; Rittaporn, I.; Rooyackers, Rita; Simoen, Eddy; Claeys, Cor
Conference
Proceedings of the 29th Congress on Science and Technology of Thailand - STT29
Title
Impact of shallow trench isolation depth on leakage current of shallow p-n junctions
Publication type
Proceedings paper
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