Show simple item record

Random deposition as a growth mode in atomic layer deposition

dc.contributor.authorPuurunen, Riikka
dc.date.accessioned2021-10-15T06:15:49Z
dc.date.available2021-10-15T06:15:49Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8041
dc.sourceIIOimport
dc.titleRandom deposition as a growth mode in atomic layer deposition
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceAtomic Layer Deposition Conference - ALD
dc.source.conferencedate4/08/2003
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record